ANALYZERS FOR ULTRA-HIGH PURITY GAS QUALITY FOR SEMICONDUCTOR MANUFACTURE


Visit Process Sensing Companies at BOOTH #5480

SemiconWest
Aii Michell Instruments Ntron Rotronic Ldetek

APPLICATIONS:

  • Pipeline commissioning
  • Verification of gas quality on entry and prior to use
  • Inerting in solder reflow ovens and wafer fabrication
  • Silicon precursors analysis for production of electrical insulators in microelectronics transistors
  • Plasma etching of silicon wafers for LCD production
  • Germane purity for epitaxial Ge-on-Si

FEATURES:

  • Plasma Emission Detectors for sub ppb trace measurement
  • One Analyzer for Multiple Impurities
  • Cost-effective Oxygen Analyzers with LDL of less than 100 ppt
  • Maximum Safety with SIL 2 – compliant with IEC 61508
  • Fast, Maintenance Free Zirconia Trace Oxygen Transmitters
  • Fast and Cost-Effective Trace Moisture Analysers for Truck Loading
  • Easy to Integrate into Your System - Small Footprint Trace Moisture Transmitters for UHP Gases
  • Maximum Reliability for Your Wafer Prober – Rugged and Maintenance Free Moisture Sensors
  • Cleanroom Monitoring with Rotronic Continuous Monitoring System

FEATURED PRODUCTS

 

QMA401 TRACE MOISTURE ANALYZER

Quartz crystal microbalance sensing technology provides reliable, fast and highly accurate measurements of trace moisture.


 

MULTIDETEK 2 COMPACT GAS CHROMATOGRAPH

Based on LDetek’s Patented Plasma Emission Detector technology, this stand-alone gas analyzer is the ideal flexible and customizable solution.


 

SIL O2 FAIL-SAFE OXYGEN ANALYZER

This SIL2 rated oxygen Analyzer has been developed specifically for the measurement and control of oxygen for process safety critical applications.


 

PURA PURE GAS TRACE MOISTURE TRANSMITTER

Rugged, self-contained hygrometer to measure trace moisture content in ultra-high-purity gases


 

RMS – CONTINUOUS MONITORING SYSTEM

Cloud based remote data logging system for use as a diagnostic tool.


 

PI2-UHP 50/100 OXYGEN ANALYZER FOR ULTRA-HIGH PURITY GASES

Accurate and stable measurements of oxygen low parts per billion – with an LDL of less than 100 ppt.


 



PST SEMICONDUCTOR BROCHURE

To discover more about the PST full offering for the semiconductor industry view and download our PST brochure here.